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AssigneePfeiffer Vacuum GmbH
InventorsJulien BOUNOUAR, Stéphane MARCHAL, Marie DE VITA, Arnaud ALEVEQUE
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A station for measuring airborne molecular contamination includes at least one gas analyzer to measure a concentration of at least one contaminant, a plurality of air inlets to be in fluidic communication with the gas analyzer and to be connected to a respective plurality of sampling lines, a plurality of first controllable isolation valves interposed between the plurality of air inlets and the gas analyzer, and a control unit to control the opening or the closure of the first controllable isolation valves in order to place the gas analyzer in fluidic communication with at least one sampling line. The control unit also commands a verification of the accuracy of the analyzer when the concentration of a contaminant greater than a predetermined threshold is detected by the analyzer.
1-16. (canceled)
A station for measuring airborne molecular contamination, comprising:
A method for detecting airborne molecular contamination using a measurement station comprising a gas analyser and a plurality of air inlets configured to be in fluidic communication with the gas analyser and configured to be connected to one or more sampling lines, said method comprising:
Dependencies are inferred from the claim text.