Scanning acoustic microscope apparatus and operating system and platform thereof

Abstract

A scanning acoustic microscope (SAM) apparatus and an operating system and platform thereof are provided. The SAM apparatus includes a platform for carrying at least one workpiece, a SAM having a detection probe, and at least one isolation element for causing an isolation state between the workpiece and a detection liquid. The operating system includes a control element configured to receive or formulate a custom path and drive the detection probe to scan according to the custom path. The platform includes a placing stage and a base defining a chamber therebetween. The detection liquid flows through the chamber to generate a negative pressure at the placing stage, thereby forming a suction force to adsorb the workpiece. The SAM apparatus provides ultrasonic waves via the detection probe that penetrate the detection liquid and the isolation element attached to the workpiece, thereby performing an ultrasonic scanning detection procedure on the workpiece.

Dependencies are inferred from the claim text.