X-ray fluorescence spectrometer

An X-ray fluorescence spectrometer, which includes:

• a sample chamber in which a sample is to be arranged;
• and an irradiation chamber divided from the sample chamber by a partition wall, the X-ray fluorescence spectrometer comprising:
• an X-ray source arranged in the irradiation chamber, the X-ray source being configured to obliquely apply X-rays toward an opening formed in a division wall between the sample chamber and the irradiation chamber;
• a window frame member configured to hold a partition film which is formed from a material that transmits the X-rays and forms a part of the partition wall, the window frame member being arranged within the opening formed in the division wall;
• and
• a film supporting member having an elongated hole for allowing the X-rays to pass therethrough, the film supporting member being arranged adjacent to the irradiation chamber side of the partition film to support the partition film from the irradiation chamber side,
• wherein, in plan view as viewed from the sample chamber side toward the irradiation chamber side, the film supporting member is arranged so that the elongated hole is parallel to an optical axis of the X-rays.