X-ray inspection method and x-ray inspection apparatus

Abstract

An X-ray inspection method comprises: an X-ray transmission image acquisition step of performing X-ray imaging of an object 1 to acquire a two-dimensional X-ray transmission image 3a; a model generation step of generating a model corresponding to the object 1 including a defect 2 as a three-dimensional virtual model 4, using a known structural parameter for the object 1; a virtual transmission image generation step of generating a two-dimensional virtual transmission image 6a from the three-dimensional virtual model; and a parameter modification step of modifying a structural parameter of the three-dimensional virtual model 4 so as to make the two-dimensional virtual transmission image 6a closer to the two-dimensional X-ray transmission image 3a, using a comparison result between the two-dimensional X-ray transmission image 3a and the two-dimensional virtual transmission image 6a.

Dependencies are inferred from the claim text.