Capacitive pressure sensors having cobalt-alloy diaphragms
AssigneeIllinois Tool Works Inc.
InventorsHai Mei, Ian Engelberg
Life of this patent
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Abstract
Disclosed example pressure sensors include: a first body defining a reference pressure cavity; a second body defining a measured pressure cavity and having an inlet configured to receive a fluid; a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less; an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm; and measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.
Claims19
A pressure sensor, comprising:
- a first body defining a reference pressure cavity;
- a second body defining a measured pressure cavity and having an inlet configured to receive a fluid;
- a diaphragm between the reference pressure cavity and the measured pressure cavity, the diaphragm comprising Havar® alloy and having a thickness of 0.010 inches or less;
- an electrode separated from the diaphragm by a gap to form a capacitance between the electrode and the diaphragm;
- and
- measurement circuitry configured to determine a pressure in the measured pressure cavity based on the capacitance.
Dependencies are inferred from the claim text.