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US 2026/0132867 A1Published application
Vibration-based health monitoring system for valves of a gas delivery system
AssigneeLam Research Corporation
InventorsGovinda RAJ, Anthony CONTRERAS
Life of this patent
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Abstract
A health monitoring system for a valve of a gas delivery system includes a fiber Bragg grating sensor configured to measure vibration of the valve of the gas delivery system. An optical fiber is connected to the fiber Bragg grating sensor. A reader is connected to the optical fiber and is configured to read the fiber Bragg grating sensor and generate a vibration signal.
Claims33
A health monitoring system for a valve of a gas delivery system, comprising:
- a fiber Bragg grating sensor configured to measure vibration of the valve of the gas delivery system;
- an optical fiber connected to the fiber Bragg grating sensor;
- and
- a reader connected to the optical fiber and configured to read the fiber Bragg grating sensor and generate a vibration signal.
1 more element
A method for monitoring health of a valve of a gas delivery system, comprising:
- sensing vibration of the valve of the gas delivery system using a fiber Bragg grating sensor;
- coupling light between the fiber Bragg grating sensor and a reader using an optical fiber;
- and
- reading the fiber Bragg grating sensor to sense vibration of the valve of the gas delivery system and generating a vibration signal.
1 more element
A health monitoring system for a valve of a gas delivery system, comprising:
- a fiber Bragg grating sensor configured to measure pressure in a valve isolation chamber of the valve to detect a crack in a diaphragm of the valve during operation.
- an optical fiber connected to the fiber Bragg grating sensor;
- and
- a reader connected to the optical fiber and configured to read the fiber Bragg grating sensor and generate a pressure signal in response to the measured pressure in the valve isolation chamber.
1 more element
Dependencies are inferred from the claim text.