Semiconductor process wastewater treatment system to which advanced oxidation process and anaerobic biological process are applied and semiconductor process wastewater treatment method using the same

Abstract

A semiconductor process wastewater treatment system and a method for treating semiconductor process wastewater using the system are disclosed. The disclosed semiconductor process wastewater treatment system comprises: an advanced oxidation reaction tank for advanced oxidation of a semiconductor process wastewater comprising tetramethyl ammonium hydroxide (TMAH) using a UV/PDS process that activates peroxydisulfate (PDS) with ultraviolet light (UV ray); an anaerobic biological reaction tank for biologically treating the semiconductor process wastewater that has passed through the advanced oxidation reactor, the anaerobic biological reaction tank configured to treat the semiconductor process wastewater with microorganisms comprising sulfate reducing bacteria (SRB) under anaerobic conditions, and configured to react sulfate generated in the advanced oxidation reactor with the sulfate reducing bacteria to generate H2S; and a gas separator for separating the H2S from gas generated in the anaerobic biological reactor.

Dependencies are inferred from the claim text.