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US 2026/0132016 A1Published application
Piezoelectric microelectromechanical device with anchor reinforcement
AssigneeQUALCOMM Incorporated
InventorsRobert John LITTRELL, Hamid BASAERI, Jong Soo CHOI, Jeroen BIELEN, Kun GAO
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Abstract
Aspects of the disclosure relate to piezoelectric microelectromechanical systems (MEMS) devices. A piezoelectric MEMS device may include a transducer body including an acoustic cavity extending from a bottom surface to a top surface; a piezoelectric cantilever disposed over the top surface and including a lever region and a sensing region; and an anchor reinforcement member disposed over the piezoelectric cantilever and the transducer body.
Claims20
A microelectromechanical system (MEMS) transducer, comprising:
- a transducer body including an acoustic cavity extending from a bottom surface to a top surface;
- a piezoelectric cantilever disposed over the top surface and including a lever region and a sensing region;
- and
- an anchor reinforcement member disposed over the piezoelectric cantilever and the transducer body.
1 more element
An apparatus, comprising:
- a microelectromechanical system (MEMS) transducer for generating an electrical signal based on acoustic signals,
- wherein the MEMS transducer includes:
- a transducer body including an acoustic cavity extending from a bottom surface to a top surface;
- a piezoelectric cantilever disposed over the top surface and including a lever region and a sensing region;
- and
- an anchor reinforcement member disposed over the piezoelectric cantilever and the transducer body.
3 more elements
An acoustic transducer, comprising:
- a substrate having a top surface and forming an acoustic cavity;
- a piezoelectric electroacoustic structure including at least one cantilever beam with a base coupled to the top surface of the substrate and extending over the acoustic cavity, the at least one cantilever beam formed from a layer stack comprising one or more alternating electrode layers and piezoelectric layers;
- and
- a layer of ductile material disposed on or above the piezoelectric electroacoustic structure and disposed over the top surface of the substrate and extending partially over the acoustic cavity.
1 more element
Dependencies are inferred from the claim text.