Segmented getter openings for micromachined ultrasound transducerdevices
AssigneeBfly Operations, Inc.
InventorsJianwei Liu, Lingyun Miao
Life of this patent
Estimating the term…
Abstract
An ultrasonic transducer device includes a bottom electrode layer of a transducer cavity disposed over a substrate, and a plurality of vias that electrically connect the bottom electrode layer with the substrate. A bottom cavity layer is disposed over the bottom electrode layer, and one or more openings are formed in the bottom cavity layer so as to expose a region of the bottom electrode layer, wherein locations of the one or more openings are segments that are disposed proximate an outer perimeter of the transducer cavity and substantially correspond to locations where the plurality of vias are not disposed directly beneath.
Claims11
An ultrasonic transducer device, comprising:
- a bottom electrode layer of a transducer cavity disposed over a substrate;
- a plurality of vias that electrically connect the bottom electrode layer with the substrate;
- a bottom cavity layer disposed over the bottom electrode layer;
- and
- one or more openings formed in the bottom cavity layer so as to expose a region of the bottom electrode layer, wherein locations of the one or more openings substantially correspond to locations where the plurality of vias are not disposed directly beneath.
An ultrasonic transducer device, comprising:
- a bottom electrode layer of a transducer cavity disposed over a substrate;
- a plurality of vias that electrically connect the bottom electrode layer with the substrate;
- a bottom cavity layer disposed over the bottom electrode layer;
- and
- one or more openings formed in the bottom cavity layer so as to expose a region of the bottom electrode layer;
- wherein the plurality of vias are disposed in locations directly beneath a footprint of the transducer cavity, the locations also being offset from directly beneath a footprint of the one or more openings.
An ultrasonic transducer device, comprising:
- a bottom electrode layer of a transducer cavity disposed over a substrate, the bottom electrode layer comprising a first portion that serves as a transducer bottom electrode and a second portion that serves as a bypass metal structure, the bypass metal structure electrically isolated from the transducer bottom electrode;
- a bottom cavity layer disposed over the bottom electrode layer;
- a plurality of openings formed in the bottom cavity layer so as to expose regions of the bypass metal structure, the plurality of openings comprising segments disposed proximate an outer perimeter of the transducer cavity, and the segments being spaced apart from one another about the outer perimeter of the transducer cavity;
- and
- a transducer membrane that seals the transducer cavity, wherein the exposed regions of the bypass metal structure serve as a getter material to consume one or more gaseous materials present in the transducer cavity during bonding of the transducer membrane.
Dependencies are inferred from the claim text.