Fluid control device and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorTakashi YOSHIDA
Life of this patent
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Abstract
A fluid control device that controls a fluid supplied into a process container includes: a flow path block; and a fluid controller installed to the flow path block. The flow path block includes: a gas supply flow path including an inlet, through which the fluid is introduced, and an outlet through which the fluid flows into the process container; and a storage chamber that stores the fluid in the gas supply flow path between the inlet and the outlet. The fluid controller includes: a first valve that opens and closes the gas supply flow path between the inlet and the storage chamber; and a second valve that opens and closes the gas supply flow path between the storage chamber and the outlet.
Claims14
A fluid control device that controls a fluid supplied into a process container, the fluid control device comprising:
- a flow path block;
- and
- a fluid controller installed to the flow path block,
- wherein the flow path block includes:
- a gas supply flow path including an inlet, through which the fluid is introduced, and an outlet through which the fluid flows into the process container;
- and
- a storage chamber that stores the fluid in the gas supply flow path between the inlet and the outlet, and
- wherein the fluid controller includes:
- a first valve that opens and closes the gas supply flow path between the inlet and the storage chamber;
- a second valve that opens and closes the gas supply flow path between the storage chamber and the outlet;
- and
- a pressure sensor that detects an internal pressure of the storage chamber,
- wherein the storage chamber has a volume larger than a volume of the gas supply flow path.
A substrate processing apparatus comprising:
- a process container;
- and
- a fluid control device that controls a fluid supplied into the process container,
- wherein the fluid control device includes:
- a flow path block;
- and
- a fluid controller installed to the flow path block,
- wherein the flow path block includes:
- a gas supply flow path including an inlet, through which the fluid is introduced, and an outlet through which the fluid flows into the process container;
- and
- a storage chamber that stores the fluid in the gas supply flow path between the inlet and the outlet, and
- wherein the fluid controller includes:
- a first valve that opens and closes the gas supply flow path between the inlet and the storage chamber;
- a second valve that opens and closes the gas supply flow path between the storage chamber and the outlet;
- and
- a pressure sensor that detects an internal pressure of the storage chamber,
- wherein the storage chamber has a volume larger than a volume of the gas supply flow path.
Dependencies are inferred from the claim text.