Method for producing a semiconductor laser and semiconductor laser
Assigneeams-OSRAM International GmbH
InventorsJelena Ristic, Hubert Halbritter
Life of this patent
Estimating the term…
Abstract
In an embodiment a method includes providing a semiconductor body having a first region of a first conductivity type, a second region and an active region for producing electromagnetic radiation arranged between the first and the second region, forming a mask on the second region, forming a hole in the mask so that a surface of the second region is exposed; and growing a mesa structure of a semiconductor material on the exposed surface of the second region in the hole of the mask, wherein the mesa structure is at least partially of a second conductivity type being different from the first conductivity type, and wherein a height of the mesa structure is at most 50 nm.
Claims19
-19. (canceled)
A method for producing a semiconductor laser, the method comprising:
- providing a semiconductor body having a first region of a first conductivity type, a second region and an active region for producing electromagnetic radiation arranged between the first and the second region;
- forming a mask on the second region;
- forming a hole in the mask so that a surface of the second region is exposed;
- and
- growing a mesa structure of a semiconductor material on the exposed surface of the second region in the hole of the mask,
- wherein the mesa structure is at least partially of a second conductivity type being different from the first conductivity type, and
- wherein a height of the mesa structure is at most 50 nm.
A semiconductor laser comprising:
- a semiconductor body having a first region of a first conductivity type, a second region and an active region configured to generate electromagnetic radiation, the active region arranged between the first and second regions;
- and
- a mesa structure of a semiconductor material grown on the second region, the mesa structure being free of traces of an etching process,
- wherein the mesa structure is at least partially of a second conductivity type different from the first conductivity type, and
- wherein a height of the mesa structure is at most 50 nm.
Dependencies are inferred from the claim text.