System and method for real-time monitoring of particles in ozone

Abstract

Disclosed is a system and a method for real-time monitoring of particles in ozone comprising an ozone reduction device for heating and reducing an ozone provided by an ozone source into an oxygen along a spiral conveying path and a particle counter for real-time monitoring of particles in the oxygen. The ozone source optionally shunts to supply a portion of the ozone to the ozone reduction device and another portion of the ozone to a process equipment, the particle counter can be used to monitor particles in the oxygen in real time while the process equipment is performing a manufacturing process, thereby preventing other non-ozone particles contained in the ozone from causing pollution, and also proving that an ozone gas provided by an ozone generator as the ozone source or an ozone tail gas emitted by the process equipment as the ozone source does not contain polluting particles.

Dependencies are inferred from the claim text.