X-ray equipment for semiconductor structural inspection and method for inspecting semiconductor structure

Inline X-ray equipment for semiconductor structure inspection, comprising:

• an X-ray source configured to radiate a broadband X-ray beam within an X-ray wavelength band obliquely to a target region of an object to be inspected;
• a first scintillator configured to output first visible light in response to a first particular wavelength band of the X-ray beam having passed through the target region;
• a second scintillator configured to output second visible light in response to a second particular wavelength band of the X-ray beam having passed through the target region;
• and
• a detector configured to output a detection signal in response to the first visible light and the second visible light.

A method for inspecting a semiconductor structure, comprising:

• radiating a target region of an object to be inspected with an X-ray beam having a cone beam shape;
• exposing a detector to visible light using a scintillator reacting to the X-ray beam having passed through the target region;
• obtaining a detection signal output by the detector;
• and
• generating an image representing measurement patterns included in the target region using the detection signal,
• wherein the image is generated using a first detection signal output by the detector and corresponding to a first particular wavelength band of the X-ray beam, and a second detection signal output by the detector and corresponding to a second particular wavelength band of the X-ray beam.