Optical coupling calibration method, system, and recording medium

An optical coupling calibration method, configured for correcting a relative position between a fiber array and a device under test (DUT) through a nanoscale driving device, wherein the optical coupling calibration method is suitable for being performed on an electronic device, and the optical coupling calibration method comprises:

• setting a rotation center of the nanoscale driving device adjacent to the DUT;
• searching for an optimal coupling point;
• rotating along a first coordinate axis to collect a plurality of pieces of first correction data;
• calculating a first rotation center deviation value based on the plurality of pieces of first correction data;
• correcting a set value of the rotation center when the first rotation center deviation value is greater than a first threshold;
• rotating along a second coordinate axis to collect a plurality of pieces of second correction data, wherein the second coordinate axis is orthogonal to the first coordinate axis;
• calculating a second rotation center deviation value based on the plurality of pieces of second correction data;
• correcting the set value of the rotation center when the second rotation center deviation value is greater than a second threshold;
• and
• positioning the rotation center onto the DUT through correction based on the set value of the rotation center corrected by the first rotation center deviation value and the second rotation center deviation value, wherein
• the nanoscale driving device is configured to control a position and an angle of the fiber array relative to the DUT.