Doped substantially single-phase rare earth oxide-zirconia materials and methods of making the same
AssigneeCoorsTek, Inc.
InventorsSteven Landin, David Henry Hook
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AssigneeCoorsTek, Inc.
InventorsSteven Landin, David Henry Hook
Estimating the term…
New substantially single-phase polycrystalline materials are disclosed. The new substantially single-phase polycrystalline materials generally include from 0.01-20 mol. % zirconia, at least 80 mol. % of one or more rare earth oxides (REO), and 40 to 7000 ppm aluminum by weight, wherein the substantially single-phase polycrystalline material comprises at least 95 wt. % of a solid-solution of REO-zirconia as measured by x-ray diffraction. The new substantially single-phase polycrystalline materials may realize a high density, such as a density of at least 95% of theoretical density, or higher. The new substantially single-phase polycrystalline materials may be in the form of a semiconductor component, including those suited for use in a plasma chamber environment.
A substantially single-phase polycrystalline material comprising yttria (Y2O3) and zirconia (ZrO2), wherein the substantially single-phase polycrystalline material comprises from 0.01-20 mol. % zirconia and at least 80 mol. % yttria, and wherein the substantially single-phase polycrystalline material further comprises from 40 to 7000 ppm aluminum by weight, wherein the substantially single-phase polycrystalline material comprises at least 95 wt. % of a solid-solution of yttria-zirconia as measured by x-ray diffraction.
A method comprising:
A substantially single-phase polycrystalline material comprising 0.1 to 20 mol. % zirconia (ZrO2) and at least 80 wt. % of at least one rare earth oxide (REO), wherein the at least one rare earth oxide is selected from the group consisting of yttria, oxides of the Lanthanide series of elements, or combinations thereof, wherein the substantially single-phase polycrystalline material further comprises from 40 to 7000 ppm aluminum by weight, wherein the substantially single-phase polycrystalline material comprises at least 95 wt. % of a solid-solution of REO-zirconia as measured by x-ray diffraction.
A method comprising:
Dependencies are inferred from the claim text.