Method for producing polishing composition containing modified polyvinyl alcohol composition and polishing composition containing modified polyvinyl alcohol composition
AssigneeFujimi Incorporated
InventorsTaiki ICHITSUBO, Kohsuke TSUCHIYA
Life of this patent
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Abstract
Provided is a method for producing a polishing composition of which filterability is good and which can reduce surface defects of an object to be polished. A method for producing a polishing composition containing a modified polyvinyl alcohol composition containing a modified polyvinyl alcohol or a derivative thereof and water includes a heat retention step of retaining the modified polyvinyl alcohol composition at a solution temperature of 30° C. or higher and lower than 60° C., in which the heat retention step is performed such that a parameter A is 2.0 or more.
Claims7
A method for producing a polishing composition comprising a modified polyvinyl alcohol composition comprising a modified polyvinyl alcohol or a derivative thereof and water, the method comprising:
- a heat retention step of retaining the modified polyvinyl alcohol composition at a solution temperature of 30° C. or higher and lower than 60° C.,
- wherein the heat retention step is performed such that a parameter A represented by a formula below is 2.0 or more.
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- Solution
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- temperature
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- of
- modified
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- polyvinyl
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- alcohol
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- composition
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- °C
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- ×
- Heat
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- retention
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- time
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- h
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- Concentration
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- of
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- modified
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- polyvinyl
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- alcohol
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- or
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- derivative
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- thereof
- in
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- modified
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- polyvinyl
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- alcohol
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- composition
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- %
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- by
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- mass
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- Parameter
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- A
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A polishing composition comprising a modified polyvinyl alcohol composition comprising a modified polyvinyl alcohol or a derivative thereof and water, wherein
- the modified polyvinyl alcohol composition is produced by a production method comprising a heat retention step of performing retention at a solution temperature of 30° C. or higher and lower than 60° C., and
- the heat retention step is performed such that a parameter A represented by a formula below is 2.0 or more.
- [
- Math
- .
- 2
- ]
-
- Solution
-
- temperature
-
- of
- modified
-
- polyvinyl
-
- alcohol
-
- composition
-
- (
- °C
- .
- )
- ×
- Heat
-
- retention
-
- time
-
- (
- h
- )
- Concentration
-
- of
-
- modified
-
- polyvinyl
-
- alcohol
-
- or
-
- derivative
-
- thereof
- in
-
- modified
-
- polyvinyl
-
- alcohol
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- composition
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- (
- %
-
- by
-
- mass
- )
- [
- Parameter
-
- A
- ]
Dependencies are inferred from the claim text.