Ceramic composite material and capillary
AssigneeIndustrial Technology Research Institute
InventorsHuai-Chen YU, Hsun-Ching HSU, Jian-Zhi WANG, Shih-Hao HUA
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Abstract
A ceramic composite material is formed by sintering powder. The powder includes silicon nitride, silicon carbide, first metal oxide, and second metal oxide. The silicon nitride and the silicon carbide have a weight ratio of 100:0.5 to 100:12. The first metal oxide is aluminum oxide, and the second metal oxide is yttrium oxide. Alternatively, the first metal oxide may be magnesium oxide, and the second metal oxide may be cerium oxide. The ceramic composite material can be used as a capillary.
Claims7
A ceramic composite material, being formed by sintering powder,
- wherein the powder comprises silicon nitride, silicon carbide, first metal oxide, and second metal oxide, the silicon nitride and the silicon carbide have a weight ratio of 100:0.5 to 100:12, and the first metal oxide is aluminum oxide or magnesium oxide, wherein
- when the first oxide is aluminum oxide, the second metal oxide is yttrium oxide;
- and
- when the first oxide is magnesium oxide, the second metal oxide is cerium oxide.
Dependencies are inferred from the claim text.