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US 2026/0124702 A1Published application
Groove forming apparatus
AssigneeEo Technics Co., Ltd.
InventorsWoong Hee JOUNG, Jung Rae PARK, Byung Oh KIM, Dong Jun LEE, Jun Young LEE, Geun Haeng LEE, Chan Hee KANG
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Abstract
A groove forming apparatus includes a laser light source configured to emit a laser beam, a multi-beam generator configured to split the laser beam into a plurality of sub-laser beams, a focusing lens unit configured to focus the plurality of sub-laser beams on a processing object, a first telecentric lens provided between the multi-beam generator and the focusing lens unit, and a second telecentric lens provided between the first telecentric lens and the focusing lens unit.
Claims13
A groove forming apparatus comprising:
- a laser light source configured to emit a laser beam;
- a multi-beam generator configured to form the laser beam as a beam having a long axis and a short axis;
- and
- a focusing lens unit configured to focus the laser beam passing through the multi-beam generator on a processing object,
- wherein the focusing lens unit is further configured to process the processing object by irradiating the laser beam to the processing object, while being arranged to have a focus positioned between the processing object and the focusing lens unit.
2 more elements
Dependencies are inferred from the claim text.