Substrate processing apparatus and substrate processing method
AssigneeSCREEN Holdings Co., Ltd.
InventorsAkihiro NAKASHIMA, Shoya FUKUMOTO
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Abstract
A configuration of a substrate processing apparatus is downsized while enabling design of a pressure sensor into a desired shape in a space between an actuator and a nozzle body. A processing unit includes: a nozzle body configured to discharge a processing liquid toward a peripheral portion of a lower surface of a substrate; a shaft configured to advance and retract in a radial direction of the substrate by driving of a motor; a pressure sensor configured to obtain a pressure value caused between the motor and the nozzle body; and an origin position detection part configured to, when the pressure value becomes equal to or greater than a predetermined threshold, detect that the nozzle body has returned to its origin.
Claims7
A substrate processing apparatus comprising:
- a rotator configured to retain a substrate with a circular shape in a horizontal position and rotate the substrate about a vertical axis passing the center of the substrate;
- a nozzle body disposed below the substrate and configured to discharge a processing liquid from a discharge port thereof toward a peripheral portion of a lower surface of the substrate;
- a shaft having one end connected to the nozzle body and the other end connected to an actuator, the shaft advancing and retracting in a radial direction of the substrate by driving of the actuator;
- a pressure sensor configured to obtain a pressure value caused between the actuator and the nozzle body by movement of the nozzle body in the radial direction of the substrate while the nozzle body is being guided by the shaft;
- and
- an origin position detection part configured to, when the pressure value becomes equal to or greater than a predetermined threshold, detect that the nozzle body has returned to an origin thereof.
A substrate processing method comprising:
- using a rotator to, while retaining a substrate with a circular shape in a horizontal position, rotate the substrate about a vertical axis passing the center of the substrate;
- causing a shaft to advance and retract in a radial direction of the substrate by driving of an actuator, the shaft having one end connected to a nozzle body disposed below the substrate so that a processing liquid is discharged from a discharge port thereof toward a peripheral portion of a lower surface of the substrate and the other end connected to the actuator;
- and
- obtaining, with use of a pressure sensor, a pressure value caused between the actuator and the nozzle body by movement of the nozzle body in the radial direction of the substrate while the nozzle body is being guided by the shaft,
- the nozzle body being, when the pressure value becomes equal to or greater than a predetermined threshold, detected to have returned to an origin thereof.
Dependencies are inferred from the claim text.