Substrate, Electronic Device, and Module
AssigneeQuanzhou Sanan Integrated Circuit Co., Ltd.
InventorsXiaoqiang LIN, Yenfu LIN
Life of this patent
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Abstract
The present invention discloses a substrate, an electronic device, and a module. The substrate provided by embodiments comprises a ceramic base having a first surface and a second surface opposite to each other; a doped layer formed in the ceramic base, extending from the first surface toward the second surface in a direction gradually approaching the second surface to a predetermined thickness, wherein the doped layer includes a target dopant element, the doping concentration of which ranges from 1×10{circumflex over ( )}17 ions/cm{circumflex over ( )}3 to 5×10{circumflex over ( )}20 ions/cm {circumflex over ( )}3.
Claims20
A substrate, comprising:
- a ceramic base having a first surface and a second surface opposite to each other;
- a doped layer formed in the ceramic base, extending from the first surface toward the second surface in a direction gradually approaching the second surface to a predetermined thickness, wherein the doped layer includes a target dopant element, the doping concentration of which ranges from 1×10{circumflex over ( )}17 ions/cm{circumflex over ( )}3 to 5×10{circumflex over ( )}20 ions/cm{circumflex over ( )}3.
An electronic device, comprising:
- a ceramic base having a first surface and a second surface opposite to each other, wherein a doped layer formed in the ceramic base, extending from the first surface toward the second surface in a direction gradually approaching the second surface to a predetermined thickness, wherein the doped layer includes a target dopant element, the doping concentration of which ranges from 1×10{circumflex over ( )}17 ions/cm{circumflex over ( )}3 to 5×10{circumflex over ( )}20 ions/cm{circumflex over ( )}3;
- a piezoelectric material layer disposed on a side of the first surface opposite to the second surface;
- an electrode disposed on a side of the piezoelectric material layer opposite to the ceramic substrate.
Dependencies are inferred from the claim text.