US 2026/0121609 A1 · ACOUSTIC WAVE DEVICE

Abstract

An acoustic wave device includes a support including a support substrate with a thickness in a first direction, a piezoelectric layer on the support in the first direction on the support, and resonators each including a functional electrode on the piezoelectric layer in the first direction on the piezoelectric layer. The support includes space portions therein at positions where the functional electrodes at least partially overlap in a planar view in the first direction. The support includes a lead portion communicating with at least one of the space portions in a planar view in the first direction, at a position that does not overlap the space portion. At least one lead portion communicates with at least two of the space portions. The piezoelectric layer includes a through-hole penetrating the piezoelectric layer at a position overlapping the lead portion in a planar view in the first direction.

Claims20

Dependent claims

An acoustic wave device comprising:

a support including a support substrate with a thickness in a first direction;
a piezoelectric layer provided on the support in the first direction;
and
a plurality of resonators each including a functional electrode provided on the piezoelectric layer in the first direction;
wherein
the support includes a plurality of space portions provided therein at positions where the functional electrodes of the plurality of resonators at least partially overlap in a planar view in the first direction;
the support includes at least one lead portion;
a length of the at least one lead portion is smaller than a length of the plurality of space portions;
and
the piezoelectric layer includes at least one through-hole penetrating the piezoelectric layer at a position overlapping the lead portion in the planar view in the first direction.

7 more elements

Dependencies are inferred from the claim text.

Acoustic wave device

Life of this patent

Acoustic wave device

Life of this patent

Abstract

Claims20