Higher order mode bulk acoustic wave device with frame structure
AssigneeSkyworks Global Pte. Ltd.
InventorsKwang Jae Shin, Stefan Bader, Zongliang Cao, Yanbo He
Life of this patent
Estimating the term…
Abstract
Aspects of this disclosure relate to a bulk acoustic wave having a higher order mode as a main mode. The bulk acoustic wave device includes a frame structure in a frame region and a piezoelectric layer that has an engineered region in at least part of the frame region. Related acoustic wave filters, multiplexers, radio frequency modules, radio frequency systems, wireless communication devices, methods of manufacture, and methods of filtering are disclosed.
Claims20
A bulk acoustic wave device having a main acoustically active region and a frame region, the bulk acoustic wave device having a higher order mode as a main mode, and the bulk acoustic wave device comprising:
- a frame structure in the frame region;
- electrodes including a first electrode and a second electrode;
- and
- a piezoelectric layer positioned between the first electrode and the second electrode in the main acoustically active region and the frame region, the piezoelectric layer having an engineered region in at least part of the frame region, and the piezoelectric layer contributing to exciting the higher order mode as the main mode.
An acoustic wave filter for filtering a radio frequency signal, the acoustic wave filter comprising:
- a bulk acoustic wave resonator having a frame region and a main acoustically active region, the bulk acoustic wave resonator including a frame structure in the frame region, electrodes including a first electrode and a second electrode, and a piezoelectric layer positioned between the first electrode and the second electrode in the main acoustically active region and the frame region, the piezoelectric layer having an engineered region in at least part of the frame region, and the piezoelectric layer contributing to exciting a higher order mode as a main mode of the bulk acoustic wave resonator;
- and
- a plurality of additional acoustic wave resonators, the bulk acoustic wave resonator and the plurality of additional acoustic wave resonators configured to filter the radio frequency signal.
A wireless communication device comprising:
- a radio frequency front end including a filter that includes a bulk acoustic wave resonator having a frame region and a main acoustically active region, the bulk acoustic wave resonator including a frame structure in the frame region, electrodes including a first electrode and a second electrode, and a piezoelectric layer positioned between the first electrode and the second electrode in the main acoustically active region and the frame region, the piezoelectric layer having an engineered region in at least part of the frame region, and the piezoelectric layer contributing to exciting a higher order mode as a main mode of the bulk acoustic wave resonator;
- an antenna coupled to the radio frequency front end;
- a transceiver in communication with the radio frequency front end;
- and
- a baseband system in communication with the transceiver.
Dependencies are inferred from the claim text.