Sample manufacturing evaluation system, control method for sample manufacturing evaluation system, and recording medium
AssigneeCanon Kabushiki Kaisha
InventorsMASAYUKI ONO, MIKA SHIKI
Life of this patent
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Abstract
A sample manufacturing evaluation system includes a sample manufacturing apparatus configured to manufacture a sample on a basis of a manufacturing condition, a measurement apparatus configured to measure the sample, and an information processing apparatus configured to evaluate the sample on a basis of a measurement result of the measurement apparatus and obtain an evaluation result of the sample. In a case where the evaluation result does not satisfy a predetermined condition, the information processing apparatus issues a notification that the evaluation result needs to be corrected.
Claims24
A sample manufacturing evaluation system comprising:
- a sample manufacturing apparatus configured to manufacture a sample on a basis of a manufacturing condition;
- a measurement apparatus configured to measure the sample;
- and
- an information processing apparatus configured to evaluate the sample on a basis of a measurement result of the measurement apparatus and obtain an evaluation result of the sample,
- wherein in a case where the evaluation result does not satisfy a predetermined condition, the information processing apparatus issues a notification that the evaluation result needs to be corrected.
A sample manufacturing evaluation system comprising:
- a sample manufacturing apparatus configured to manufacture a sample on a basis of a manufacturing condition;
- a first measurement apparatus configured to measure the sample;
- a second measurement apparatus configured to measure the sample with a higher precision than the first measurement apparatus;
- and
- an information processing apparatus configured to evaluate the sample on a basis of a measurement result of the first measurement apparatus and obtain an evaluation result of the sample,
- wherein in a case where the evaluation result does not satisfy a predetermined condition, the information processing apparatus causes the second measurement apparatus to measure the sample, evaluates the sample on a basis of a measurement result of the second measurement apparatus, and updates the evaluation result of the sample.
A sample manufacturing evaluation system comprising:
- a sample manufacturing apparatus configured to manufacture a sample on a basis of a manufacturing condition;
- a measurement apparatus configured to measure the sample;
- and
- an information processing apparatus configured to evaluate the sample on a basis of a measurement result of the measurement apparatus and obtain an evaluation result of the sample,
- wherein the information processing apparatus is configured to:
- in a case where at least one first evaluation result obtained from at least one first measurement result of the sample manufactured in accordance with the manufacturing condition satisfies a predetermined condition, cause the sample manufacturing apparatus to re-manufacture the sample;
- obtain at least one second measurement result from the measurement apparatus by causing the measurement apparatus to measure the re-manufactured sample;
- obtain at least one second evaluation result on a basis of the at least one second measurement result;
- and
- update the manufacturing condition on a basis of the at least one second evaluation result.
A control method for a sample manufacturing evaluation system including a sample manufacturing apparatus, a measurement apparatus, and an information processing apparatus, the control method comprising:
- causing the sample manufacturing apparatus to manufacture a sample on a basis of a manufacturing condition;
- causing the measurement apparatus to measure the sample;
- causing the information processing apparatus to evaluate the sample on a basis of a measurement result of the measurement apparatus and obtain an evaluation result of the sample;
- and
- in a case where the evaluation result does not satisfy a predetermined condition, causing the information processing apparatus to issue a notification that the evaluation result needs to be corrected.
A control method for a sample manufacturing evaluation system including a sample manufacturing apparatus, a first measurement apparatus, a second measurement apparatus having a higher measurement precision than the first measurement apparatus, and an information processing apparatus, the control method comprising:
- causing the sample manufacturing apparatus to manufacture a sample on a basis of a manufacturing condition;
- causing the first measurement apparatus to measure the sample;
- causing the information processing apparatus to evaluate the sample on a basis of a measurement result of the first measurement apparatus and obtain an evaluation result of the sample;
- in a case where the evaluation result does not satisfy a predetermined condition, causing the second measurement apparatus to measure the sample;
- and
- causing the information processing apparatus to evaluate the sample on a basis of a measurement result of the second measurement apparatus and update the evaluation result of the sample.
A control method for a sample manufacturing evaluation system including a sample manufacturing apparatus, a measurement apparatus, and an information processing apparatus, the control method comprising:
- causing the sample manufacturing apparatus to manufacture a sample on a basis of a manufacturing condition;
- causing the measurement apparatus to measure the sample to obtain a first measurement result;
- causing the information processing apparatus to obtain a first evaluation result on a basis of the first measurement result;
- in a case where the first evaluation result satisfies a predetermined condition, causing the sample manufacturing apparatus to re-manufacture a sample;
- causing the measurement apparatus to measure the re-manufactured sample to obtain a second measurement result;
- causing the information processing apparatus to obtain a second evaluation result on a basis of the second measurement result;
- and
- causing the information processing apparatus to update the manufacturing condition on a basis of the second evaluation result.
Dependencies are inferred from the claim text.