Composition, resist film, pattern forming method, and method for producing electronic device
AssigneeFUJIFILM Corporation
InventorsMasafumi Kojima, Akiyoshi Goto
Life of this patent
Estimating the term…
Loading patent…
AssigneeFUJIFILM Corporation
InventorsMasafumi Kojima, Akiyoshi Goto
Estimating the term…
The present invention provides a composition from which a pattern having high resolution can be formed. The present invention provides a resist film, a pattern forming method, and a method for producing an electronic device that are related to the composition. A composition according to the present invention includes a compound A having a plurality of iodine atoms that are each an iodine atom bonded to a carbon atom, and a compound B having a plurality of specific functional groups that are each a specific functional group selected from the group consisting of a nitrogen-containing aromatic heterocyclic group, —NH2, an NH2 group protected with a removable protecting group, —NHRN1, an NHRN1 group protected with a removable protecting group, —NRN22, —C≡N, —OH, —ORO, —SH, —SRS, —PRP12, and —P(ORP2)2 and not having an iodine atom bonded to a carbon atom. The composition satisfies at least one of requirement 1 or requirement 2.
A composition comprising:
Dependencies are inferred from the claim text.