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US 2026/0118657 A1Published application
Mems mirror with reduced deformation
AssigneeMurata Manufacturing Co., Ltd.
InventorMatti LIUKKU
Life of this patent
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Abstract
A MEMS mirror device is provided that includes a reflector, a support structure and a first suspension structure. The first suspension structure configures the reflector to rotate about a rotation axis. Stiffening springs extend from the support structure to the reflector. Each stiffening spring comprises one or more folds in the support plane.
Claims19
A MEMS mirror device comprising:
- a reflector;
- a support structure that defines a support plane;
- a first suspension structure that extends from the support structure to the reflector and configures the reflector to rotate about a first rotation axis out of the support plane;
- one or more first stiffening springs that extend from the support structure to the reflector on a first side of the first rotation axis;
- and
- one or more second stiffening springs that extend from the support structure to the reflector on a second side of the first rotation axis that is opposite to the first side of the first rotation axis,
- wherein each of the one or more first stiffening springs and the one or more second stiffening springs comprises one or more folds in the support plane, and
- wherein the first suspension structure comprises a first torsionally flexible spring and a second torsionally flexible spring that are aligned on the first rotation axis on opposite sides of the reflector and that extend from the support structure to first attachment points on opposite sides of the reflector.
5 more elements
Dependencies are inferred from the claim text.