Sensing device
AssigneeTXC Corporation
InventorsBing-Jyun Guo, Chih-Hung Chiu, Yu Wen Feng
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Abstract
A sensing device includes a quartz substrate, a first electrode, and a second electrode. The first electrode and the second electrode are respectively disposed on two opposite surfaces of the quartz substrate. The first electrode includes a first gold metal layer, a first chromium metal layer, and a first chromium oxide layer. The first gold metal layer is disposed on a surface of the quartz substrate. The first chromium metal layer is disposed between the first gold metal layer and the quartz substrate. The first chromium oxide layer is disposed between the first chromium metal layer and the first gold metal layer. A thickness of the first chromium oxide layer is greater than or equal to 1 nanometer and less than or equal to 10 nanometers.
Claims7
A sensing device, comprising:
- a quartz substrate, having a first surface and a second surface opposite to each other;
- and
- a first electrode and a second electrode, respectively disposed on the first surface and the second surface, wherein the first electrode comprises:
- a first gold metal layer, disposed on the first surface of the quartz substrate;
- a first chromium metal layer, disposed between the first gold metal layer and the quartz substrate;
- and
- a first chromium oxide layer, disposed between the first chromium metal layer and the first gold metal layer, wherein a thickness of the first chromium oxide layer is greater than or equal to 1 nanometer and less than or equal to 10 nanometers.
Dependencies are inferred from the claim text.