Sensor apparatus
AssigneeMmi Semiconductor Co., Ltd.
InventorsToshihiko NIMURA, Makoto KAMEI, Izumi KUROSE
Life of this patent
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Abstract
A sensor apparatus, includes: a casing in which a first opening and a second opening are formed; a first flow channel formed in the casing and that communicates with the first opening and the second opening to form a flow of fluid from the first opening to the second opening; a pressure changer formed in the first flow channel and that is configured to change the pressure of the fluid flowing through the first flow channel; a second flow channel which branches from the first flow channel on an upstream side relative to the pressure changer; and a third flow channel which communicates with the second flow channel and in which a detector of a sensor chip is arranged.
Claims10
A sensor apparatus, comprising:
- a casing in which a first opening and a second opening are formed;
- a first flow channel formed in the casing and that communicates with the first opening and the second opening to form a flow of fluid from the first opening to the second opening;
- a pressure changer formed in the first flow channel and that is configured to change the pressure of the fluid flowing through the first flow channel;
- a second flow channel which branches from the first flow channel on an upstream side relative to the pressure changer;
- and
- a third flow channel which communicates with the second flow channel and in which a detector of a sensor chip is arranged, wherein
- the first flow channel includes a curved portion forming an arc as viewed in a first direction, the curved portion being formed upstream of the pressure changer,
- in a cross section crossing the first direction, the curved portion includes a first surface and a second surface which face each other in a direction along a radius of curvature of the curved portion,
- the second surface is disposed closer to a center of curvature of the curved portion as compared with the first surface, and
- a third opening is formed in the second surface as a connection portion connecting the first flow channel and the second flow channel.
Dependencies are inferred from the claim text.