Substrate processing apparatus and power transmission method in vacuum chamber

An apparatus for processing a substrate, the apparatus comprising:

• at least one transfer chamber;
• and
• a process chamber;
• and
• a transfer robot which is linearly movable within the transfer chamber and transfers a substrate to the transfer chamber,
• wherein the transfer robot includes a power receiving unit that receives power,
• the transfer chamber includes:
• a chamber base;
• and
• a power feeding unit provided in the chamber base,
• the power feeding unit includes:
• a plurality of power feeding cables;
• a plurality of terminal units connected to one end and the other end of the plurality of power feeding cables,
• the plurality of terminal units includes:
• a front terminal unit connected with a power supply device;
• and
• a rear terminal unit electrically farther from the power supply device than the front terminal unit,
• the front terminal unit includes:
• a first front terminal unit electrically adjacent to the power supply device;
• and
• a second front terminal unit electrically farther from the power supply device than the first front terminal unit,
• the first front terminal unit and the second front terminal unit include the plurality of terminals, and
• the terminals included in the first front terminal unit and the terminals included in the second front terminal unit are provided in pairs to be electrically connected to each other, and
• supply cables for supplying the current of the power supply device are connected to a part of the plurality of terminals of the first front terminal unit, and second connection members for returning the current flowing-in from the rear terminal unit into the front terminal unit are connected to another part.