Module for generating high-density plasma in direct type

Abstract

The present invention provides a plasma generation module comprising: multiple needle-shaped discharge electrodes disposed in multiple cells arranged in the XY plane such that the peaks thereof are oriented in the Z-axis direction at the centers of the cells; ground electrodes formed on perimeters of the cells in one-to-one correspondence with the peaks in the XY plane at the same height as the peaks; a guide block on which the ground electrodes are seated and which has grooves into which the multiple needle-shaped discharge electrodes are inserted; and a first terminal electrically connected to multiple needle-shaped discharge electrodes, and a second terminal electrically connected to the ground electrodes. According to the present invention, it is possible to generate plasma in a multiphasic and uniform manner by using the discharge electrodes and the ground electrodes included in the multiple cells.

Dependencies are inferred from the claim text.