Connector assembly, and substrate-processing apparatus comprising same
AssigneePsk Inc.
InventorBUM SU PARK
Life of this patent
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Abstract
The present invention provides a substrate-processing apparatus. The substrate-processing apparatus comprises: a housing having a processing space for processing a substrate; a support unit for supporting the substrate in the processing space; a plasma source for generating plasma using a process gas supplied to the processing space; and a connector assembly for supplying power to components provided in the apparatus, wherein the connector assembly may comprise a body having a groove formed on the outer surface thereof, a pin unit inserted into the groove, and a fuse installed in the pin unit.
Claims11
An apparatus for processing a substrate, the apparatus comprising:
- a housing having a processing space for processing a substrate;
- a support unit for supporting a substrate in the processing space;
- a plasma source for generating plasma from process gas supplied to the processing space;
- and
- a connector assembly provided to supply power to a component provided in the apparatus,
- wherein the connector assembly includes:
- a body having a groove formed on an external surface;
- a pin unit inserted into the groove;
- and
- a fuse installed in the pin unit.
A connector assembly comprising:
- a body having a groove formed on an external surface;
- a pin unit inserted into the groove;
- and
- a fuse installed in the pin unit,
- wherein the pin unit is detachably provided on the body.
Dependencies are inferred from the claim text.