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US 2026/0112441 A1Published application
Semiconductor device detecting defect in metal lines
AssigneeSK hynix Inc.
InventorsSeng Min YANG, Byeong Cheol LEE
Life of this patent
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Abstract
A semiconductor device includes a power control circuit configured to generate a stress signal including pulses generated during a period that is controlled when a test mode signal is enabled and configured to apply stress to a metal line by driving the metal line based on the stress signal, and a power supply circuit configured to supply a driving voltage to a sense amplifier during an interval while a power control signal is enabled.
Claims25
A semiconductor device comprising:
- a power control circuit configured to generate a stress signal including pulses generated during a period that is controlled when a test mode signal is enabled and configured to apply stress to a metal line by driving the metal line based on the stress signal;
- and
- a power supply circuit configured to supply a driving voltage to a sense amplifier during an interval while a power control signal is enabled.
A semiconductor device comprising:
- a power control circuit configured to generate a selection counting signal including pulses generated during a period controlled when a test mode signal is enabled, configured to generate a stress signal based on the selection counting signal when a burn-in test signal is enabled, and configured to drive a metal line based on the stress signal;
- a sense amplifier configured to sense and amplify a voltage difference between a bit line and an inverted bit line in response to a driving voltage supplied during an interval while a power control signal is generated;
- and
- a defect detection circuit configured to detect a defect in the metal line by detecting a voltage level of the bit line and the inverted bit line.
1 more element
A method comprising:
- during a test mode:
- generating a stress signal including pulses generated during one of a plurality of periods;
- and
- applying the stress signal to a metal line of a semiconductor device to stress the metal line;
- and
- during a normal mode:
- generating a power control signal and applying the power control signal to the metal line;
- and
- supplying a driving voltage to a sense amplifier while the power control signal is enabled.
6 more elements
Dependencies are inferred from the claim text.