Fabrication method of apparatus for optical coupling
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFeng-Wei KUO, Chewn-Pu Jou
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Abstract
Disclosed are apparatuses for optical coupling and a system for communication. In one embodiment, an apparatus for optical coupling having an optical coupling region is disclosed. The apparatus for optical coupling includes a substrate and a core layer disposed on the substrate. The core layer includes a plurality of holes located in the optical coupling region. An effective refractive index of the core layer gradually decrease from a first end of the optical coupling region to a second end of the optical coupling region.
Claims20
A fabrication method of an apparatus for optical coupling, comprising:
- patterning a core layer to form a plurality of holes in an optical coupling region of the apparatus for optical coupling,
- wherein the plurality of holes are arranged along a plurality of lines extending from a first end of the optical coupling region to a second end of the optical coupling region,
- wherein lines among the plurality of lines adjacent to a central portion of the optical coupling region are straight lines,
- wherein lines among the plurality of lines adjacent to a peripheral portion of the optical coupling region are curved lines, and
- wherein in a cross-sectional view, widths and intervals of the plurality of holes gradually increase from the first end to the second end.
A fabrication method of an apparatus for optical coupling, comprising:
- patterning a core layer to form a plurality of holes in an optical coupling region of the apparatus for optical coupling,
- wherein the plurality of holes are arranged along a plurality of lines,
- wherein the plurality of lines are parallel lines extending along a first direction pointing from a first end of the optical coupling region to a second end of the optical coupling region,
- wherein the plurality of lines are arranged along a second direction perpendicular to the first direction, and
- wherein in a cross-sectional view, widths and intervals of the holes increase from the first end to the second end.
A fabrication method of an apparatus for optical coupling, comprising:
- patterning a core layer to form a plurality of holes in an optical coupling region of the apparatus for optical coupling,
- wherein the plurality of holes are arranged along a plurality of lines extending from a first end of the optical coupling region to a second end of the optical coupling region,
- wherein the plurality of lines converge near the first end and diverge near the second end, and
- wherein in a cross-sectional view, widths and intervals of the holes increase from the first end to the second end.
Dependencies are inferred from the claim text.