Analysis apparatus and analysis method

An analysis device comprising:

• a processor;
• and
• a memory storing program instructions that cause the processor to:
• divide log data of each of sensors of sensor groups for detecting states of a substrate processing apparatus into segments and store the log data divided for each of the segments in a data storage unit for each of the sensors;
• perform an analysis on a state change between the substrate processing apparatus before maintenance and the substrate processing apparatus after the maintenance by analyzing the substrate processing apparatus based on the log data divided for each of the segments stored in the data storage unit, the log data being obtained before and after the maintenance;
• and
• display a result of the analysis.

An analysis method comprising:

• dividing log data of each of sensors of sensor groups for detecting states of each of a plurality of substrate processing apparatuses into segments and storing the log data divided for each of the segments in a data storage unit for each of the sensors;
• performing an analysis on an inter-apparatus difference between the plurality of substrate processing apparatuses by analyzing each of the plurality of substrate processing apparatuses based on the log data divided for each of the segments stored in the data storage unit;
• and
• displaying a result of the analysis.