Gas distributor, gas delivery apparatus, and film processing apparatus thereof

A gas delivery apparatus, comprising:

• a cover plate provided with a gas delivery channel;
• a gas distributor located below the cover plate, the gas distributor comprising:
• a first surface and a second surface arranged opposite to each other, wherein a gas diffusion channel is arranged in the gas distributor, the gas diffusion channel comprises a recessed portion with a bottom surface protruding from the second surface, the recessed portion divides an area below the second surface into an inner area and an outer area, the recessed portion comprises a first sidewall and a second sidewall, where the first sidewall surrounds the inner area and comprises a plurality of first gas channels, and the second sidewall surrounds the first sidewall and comprises a plurality of second gas channels, and gases in the gas diffusion channel enter the inner area via the first gas channels and enter the outer area via the second gas channels, wherein the gas delivery channel is in gas communication with the gas diffusion channel;
• and
• a shower head, located below the gas distributor and provided with a plurality of gas through-holes;
• wherein an upper surface of the shower head and the inner area below the gas distributor form a central gas diffusion area, and the upper surface of the shower head and the outer area below the gas distributor form a peripheral gas diffusion area, gases in both the central gas diffusion area and the peripheral gas diffusion area flow out through the gas through-holes on the shower head below.

A thin film processing apparatus, comprising:

• a reaction chamber, comprising a top cover and a chamber body;
• and
• a gas delivery apparatus connected to the top cover and used to deliver process gas into an interior of the reaction chamber, the gas delivery apparatus comprising:
• a cover plate provided with a gas delivery channel;
• a gas distributor located below the cover plate, the gas distributor comprising:
• a first surface and a second surface arranged opposite to each other, wherein a gas diffusion channel is arranged in the gas distributor, the gas diffusion channel comprises a recessed portion with a bottom surface protruding from the second surface, the recessed portion divides an area below the second surface into an inner area and an outer area, the recessed portion comprises a first sidewall and a second sidewall, where the first sidewall surrounds the inner area and comprises a plurality of first gas channels, and the second sidewall surrounds the first sidewall and comprises a plurality of second gas channels, and gases in the gas diffusion channel enter the inner area via the first gas channels and enter the outer area via the second gas channels, wherein the gas delivery channel is in gas communication with the gas diffusion channel;
• and
• a shower head, located below the gas distributor and provided with a plurality of gas through-holes;
• wherein an upper surface of the shower head and the inner area below the gas distributor form a central gas diffusion area, and the upper surface of the shower head and the outer area below the gas distributor form a peripheral gas diffusion area, gases in both the central gas diffusion area and the peripheral gas diffusion area flow out through the gas through-holes on the shower head below.