Dispersion for polishing
AssigneeDaiichi Kigenso Kagaku Kogyo Co., Ltd.
InventorsFumiyuki TAKASAKI, Kiyoaki ASAHI
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Abstract
A dispersion for polishing containing a zirconium oxide and a polishing aid, wherein the zirconium oxide comprises a monoclinic phase and has a ratio of crystallite size of a monoclinic (−111) side to a monoclinic (111) side ((−111) side/(111) side) of from 0.50 to 0.95. The dispersion for polishing and the powder for polishing of the present invention can be used in a chemical mechanical polishing (CMP) such as a SiC wafer, and can be utilized in a production process of a semiconductor and the like.
Claims18
A dispersion for polishing comprising a zirconium oxide and a polishing aid, wherein the zirconium oxide comprises a monoclinic phase, and has a ratio of crystallite size of a monoclinic (−111) side to a monoclinic (111) side ((−111) side/(111) side) of from 0.50 to 0.95.
A method for producing a dispersion for polishing comprising a zirconium oxide and a polishing aid:
- comprising preparing the dispersion using the zirconium oxide and the polishing aid, wherein the zirconium oxide comprises a monoclinic phase and has a ratio of crystallite size of a monoclinic (−111) side to a monoclinic (111) side ((−111) side/(111) side) of from 0.50 to 0.95.
A method for improving a polishing rate:
- comprising polishing using a zirconium oxide and a polishing aid, wherein the zirconium oxide comprises a monoclinic phase and has a ratio of crystallite size of a monoclinic (−111) side to a monoclinic (111) side ((−111) side/(111) side) of from 0.50 to 0.95.
A method for reducing a surface roughness Ra:
- comprising polishing using a zirconium oxide and a polishing aid, wherein the zirconium oxide comprises a monoclinic phase and has a ratio of crystallite size of a monoclinic (−111) side to a monoclinic (111) side ((−111) side/(111) side) of from 0.50 to 0.95.
A powder for polishing comprising a zirconium oxide powder, wherein the zirconium oxide powder comprises a monoclinic phase and has a ratio of crystallite size of a monoclinic (−111) side to a monoclinic (111) side ((−111) side/(111) side) of from 0.50 to 0.95.
Dependencies are inferred from the claim text.