Cassette transport system
AssigneeSamsung Display Co., Ltd.
InventorSu Sun CHOI
Life of this patent
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Abstract
A cassette transport system includes stockers which stores cassettes accommodating substrates therein, processing apparatuses respectively connected to the stockers, and a controller which controls transportation of the cassettes. The controller selects, as a first stocker, a stocker of which a storage modulus is greater than or equal to a reference storage modulus among the stockers, and controls dischargeable cassettes among the cassettes stored in the first stocker to be sequentially discharged from the first stocker according to a predetermined order.
Claims17
A cassette transport system comprising:
- stockers which store cassettes accommodating substrates therein;
- processing apparatuses respectively connected to the stockers;
- and
- a controller which controls a transportation of the cassettes,
- wherein the controller selects, as a first stocker, a stocker of which a storage modulus is greater than or equal to a reference storage modulus among the stockers, and controls dischargeable cassettes among the cassettes stored in the first stocker to be sequentially discharged from the first stocker according to a predetermined order.
A cassette transport system comprising:
- stockers disposed on a plurality of floors in a factory, wherein the stockers store cassettes accommodating substrates therein;
- processing apparatuses respectively connected to the stockers;
- and
- a controller which controls a transportation of the cassettes, based on a total transport volume of the cassettes calculated for each floor,
- wherein the controller:
- controls cassettes stored in a normal stocker among stockers disposed on a corresponding floor not to be discharged, when the total transport volume is greater than a first reference volume;
- and
- controls at least one of cassettes stored in a predetermined stocker among the stockers disposed on the corresponding floor to be discharged, when the total transport volume is greater than the first reference volume and is smaller than a second reference volume greater than the first reference volume.
Dependencies are inferred from the claim text.