US 2026/0107672 A1Published application

Laser irradiation system, laser irradiation method, and method for manufacturing organic el display

AssigneeJsw Aktina System Co., Ltd.

InventorsTeruaki SHIMOJI, Rei MATSUSHITA, Daisuke ITO, Tamotsu ODAJIMA

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Abstract

A laser irradiation system (1) includes: a conveyance stage (150); an observation apparatus (110) that captures an image of a workpiece; a laser irradiation unit (170) that irradiates the workpiece, which is inspected by the observation apparatus, with a laser light; a dust collecting mechanism (130) that sucks gas in a periphery of an irradiation region of the laser light; a processing unit (20) that determines whether or not the workpiece is defective based on a captured image of the workpiece captured before the workpiece is irradiated with the laser light; and a control unit that controls the conveyance stage so that the workpiece is not conveyed toward the laser irradiation unit when it is determined that the workpiece is defective.

Claims9

Dependent claims

A laser irradiation system comprising:

a conveyance stage configured to convey a workpiece including a separating layer to be separated by laser lift off;
an observation apparatus configured to capture an image of the workpiece by detecting light from the workpiece being conveyed;
a laser irradiation unit configured to irradiate the workpiece, which is inspected by the observation apparatus, with a laser light along a line direction inclined from a conveying direction in a top view;
a dust collecting mechanism configured to suck gas in a periphery of an irradiation region of the laser light;
a processing unit configured to determine whether or not the workpiece is defective based on a captured image of the workpiece captured before the workpiece is irradiated with the laser light;
and
a control unit configured to control, when it is determined that the workpiece is defective, the conveyance stage so that the workpiece is not conveyed toward the laser irradiation unit, and control, when it is determined that the workpiece is non-defective, the conveyance stage so that the workpiece that has been irradiated with the laser light is conveyed toward the observation apparatus in order for the observation apparatus to inspect the workpiece.

4 more elements

A laser irradiation method comprising the steps of:

(a) capturing an image of a workpiece by causing a conveyance stage to convey the workpiece so that the workpiece including a separating layer to be separated by laser lift off passes through an observation apparatus;
(b) determining whether or not the workpiece is defective based on the captured image of the workpiece;
(c) controlling, when it is determined that the workpiece is defective, the conveyance stage so that the workpiece is not conveyed toward a laser irradiation unit;
(d) controlling, when it is determined that the workpiece is non-defective, the conveyance stage so that the workpiece is conveyed toward the laser irradiation unit;
(e) causing the laser irradiation unit to irradiate the workpiece with a laser light along a line direction inclined from a conveying direction in a top view;
(f) sucking gas in a vicinity of an irradiation region of the laser light;
(g) capturing an image of the workpiece by causing the conveyance stage to convey the workpiece so that the workpiece that has been irradiated with the laser light passes through the observation apparatus;
and
(h) determining whether or not the workpiece is defective based on the captured image of the workpiece that has been irradiated with the laser light.

6 more elements

A method for manufacturing an organic EL display comprising the processes of:

(SA) forming a separating layer over a substrate;
(SB) forming an element over the separating layer;
(SC) separating the substrate from the separating layer;
and
(SD) laminating a film over the separating layer, wherein
the process (SC) of separating the substrate from the separating layer comprises the steps of:
(C1) capturing an image of a substrate by causing a conveyance stage to convey the substrate so that the substrate passes through an observation apparatus;
(C2) determining whether or not the substrate is defective based on the captured image of the substrate;
(C3) controlling, when it is determined that the substrate is defective, the conveyance stage so that the substrate is not conveyed toward a laser irradiation unit;
(C4) controlling, when it is determined that the substrate is non-defective, the conveyance stage so that the substrate is conveyed toward the laser irradiation unit;
(C5) causing the laser irradiation unit to irradiate the substrate with a laser light along a line direction inclined from a conveying direction in a top view;
(C6) sucking gas in a vicinity of an irradiation region of the laser light;
(C7) capturing an image of the substrate by causing the conveyance stage to convey the substrate so that the substrate that has been irradiated with the laser light passes through the observation apparatus;
and
(C8) determining whether or not the substrate is defective based on the captured image of the substrate that has been irradiated with the laser light.

12 more elements

Dependencies are inferred from the claim text.

Facts

Application: 19/117,263Filed 12 Jul 2023
Priority: JP 2022-16842420 Oct 2022
Published: 16 Apr 2026
Term ends: Not estimatedThe source records don’t support an estimate.

Classification20 codes

H10K 71/221
Changing the shape of the active layer in the devices, e.g. patterning: by lift-off techniques
H10K 71/70
Manufacture or treatment specially adapted for the organic devices covered by this subclass: testing, e.g. accelerated lifetime tests
B23K 26/142
Using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor: for the removal of by-products
B23K 26/16
Working by laser beam, e.g. welding, cutting or boring: removal of by-products, e.g. particles or vapours produced during treatment of a workpiece