Resonator and preparation method therefor

A preparation method for a resonator, wherein the method comprises:

• sequentially forming a stacked second piezoelectric layer, a first electrode layer, and a first piezoelectric layer on a substrate;
• forming a mass loading layer on the first piezoelectric layer;
• forming a second electrode layer on the mass loading layer and forming a lower electrode on the first piezoelectric layer, wherein the second electrode layer and the lower electrode are arranged at intervals;
• forming a dielectric layer on the lower electrode;
• forming at least one upper electrode on the dielectric layer, wherein the lower electrode, the dielectric layer, and the at least one upper electrode form a capacitor stacking layer;
• and
• forming a passivation layer on the second electrode layer, wherein the passivation layer extends above the capacitor stacking layer.