Control apparatus, positioning apparatus, lithography apparatus, and article manufacturing method

Abstract

Control apparatuses, positioning apparatuses, lithography apparatuses, article manufacturing methods, and storage mediums are provided herein. A control apparatus controls an object based on a feedforward manipulated variable generated by a feedforward controller. The apparatus includes a determinator that operates to determine a gain of the feedforward controller based on a control error data string indicating a change in control error in the object and a response data string indicating a response characteristic of the object when a specific manipulated variable is provided to the object. The determinator generates a representative value data string constituted by representative values of control errors of the object at respective times based on a plurality of control error data strings acquired over a plurality of times and determines the gain based on the representative value data string and the response data string.

Dependencies are inferred from the claim text.