Photocuring Ceramic Slurry and Components Manufactured Therefrom for Thermal Management Applications
AssigneeII-Vi Delaware, Inc.
InventorsJiwen Wang, Michael Aghajanian, Jonathan Coppola
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Abstract
The present disclosure provides a novel method for fabricating thermal management devices. The present disclosure is directed to a photocuring ceramic slurry comprising: 50 to 70 wt. % opaque ceramic particles; 30 to 50 wt. % light curing resin; and 0.3 to 1 wt. % dispersing agent, wherein the dispersing agent promotes light to penetrate and cure the photocuring slurry. Thermal management components manufactured from slurries include a vacuum wafer chuck with internal water-cooling channels and a micro-cooler heat management device with internal channels and pins.
Claims24
A photocuring ceramic slurry comprising:
- 50 to 70 wt. % opaque ceramic particles;
- 30 to 50 wt. % light curing resin;
- 0.3 to 1 wt. % dispersing agent;
- and
- wherein the dispersing agent promotes light to penetrate and cure the photocuring slurry.
A method of making a ceramic component from a photocuring slurry, the method comprising:
- placing the photocuring slurry in a light curing resin tank, wherein the photocuring slurry comprises:
- 50 to 70 wt. % opaque ceramic particles;
- 30 to 50 wt. % light curing resin;
- and
- 0.3 to 1 wt. % dispersing agent,
- subjecting the slurry to light to cause a portion of the slurry react and form preform ceramic component;
- and
- reaction bonding the preform ceramic component to yield a ceramic component.
A vacuum wafer chuck comprising:
- a main body portion, and
- discrete pins for supporting a semiconductor wafer, wherein the pins are located at least partially within the main body portion, wherein the main body portion and pins are formed from a photocuring ceramic slurry comprising:
- 50 to 70 wt. % opaque ceramic particles;
- 30 to 50 wt. % light curing resin;
- and
- 0.3 to 1 wt. % dispersing agent.
A heat management device, comprising:
- a ceramic body;
- and
- a network of channels defined in a surface of the ceramic body, wherein the ceramic body is formed from a photocuring ceramic slurry comprising:
- 50 to 70 wt. % opaque ceramic particles;
- 30 to 50 wt. % light curing resin;
- and
- 0.3 to 1 wt. % dispersing agent.
A heat management device, comprising:
- a ceramic body;
- and
- a network of internal channels and/or chambers in the ceramic body, wherein the ceramic body is formed from a photocuring ceramic slurry comprising:
- 50 to 70 wt. % opaque ceramic particles;
- 30 to 50 wt. % light curing resin;
- and
- 0.3 to 1 wt. % dispersing agent.
Dependencies are inferred from the claim text.