System for testing semiconductors and corresponding test method
AssigneeSTMicroelectronics International N.V.
InventorsGiorgio POLLACCIA, Giulio ZOPPI, Francesco CAMARDA, Giuseppe RUMI
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AssigneeSTMicroelectronics International N.V.
InventorsGiorgio POLLACCIA, Giulio ZOPPI, Francesco CAMARDA, Giuseppe RUMI
Estimating the term…
A probing array of individual cells applies electrical stimulation signals to respective semiconductor devices under test to detect a fault condition based on received electrical reaction signals. The individual cells in the probing array are temporarily disabled in response to a detected fault condition in the respective semiconductor device under test, and cell clusters issue alert signals indicative of a fault condition detected in at least one individual cell therein. Based on these alert signals, which can be managed either individually or as combined alert signals common to many cell clusters, logic circuitry performs a query of individual cells in the probing array and identifies individual cells in the probing array where a fault condition is detected in the respective semiconductor device under test. The system can permanently disable individual cells where a persisting fault condition is detected.
A system, comprising:
A method of testing semiconductor devices via a probing array including individual cells configured to co-operate with semiconductor devices under test where the individual cells in the probing array are arranged in cell clusters, the method comprising:
Dependencies are inferred from the claim text.