Inspection apparatus using ultrasonic waves and method of inspecting power module using ultrasonic waves

Abstract

An inspection apparatus using ultrasonic waves is provided. The inspection apparatus includes a first ultrasonic wave scanner disposed at one side of an inspection target, the first ultrasonic wave scanner configured to move to scan the inspection target, and a second ultrasonic wave scanner disposed at the other side of the inspection target. The second ultrasonic wave scanner is configured to move to scan the inspection target. The first ultrasonic wave scanner is configured to transmit ultrasonic waves to the inspection target, and to receive first reflected ultrasonic waves, reflected from the inspection target. The second ultrasonic wave scanner is configured to receive penetration ultrasonic waves penetrated through the inspection target.

Dependencies are inferred from the claim text.