Apparatus and method for detecting reflective electron
AssigneeSamsung Eletronics Co., Ltd.
InventorRyuju SATO
Life of this patent
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Abstract
Provided is a reflective electron detection apparatus and a reflective electron detection method for acquiring an energy loss spectrum with higher precision. A reflective electron detection apparatus includes an irradiator configured to irradiate a target surface of a sample with an electron, a detector configured to detect at least a portion of the electron which is reflected from the target surface, a voltage application circuitry configured to apply a voltage to the sample, and a correction circuitry configured to correct a first electric field between the target surface of the sample to which is the voltage is applied and the irradiator and a second electric field between the target surface of the sample to which is the voltage is applied and the detector.
Claims20
A reflective electron detection apparatus comprising:
- an irradiator configured to irradiate a target surface of a sample with at least one electron;
- a detector configured to detect at least a portion of the at least one electron which is reflected from the target surface;
- a voltage application circuitry configured to apply a voltage to the sample;
- and
- a correction circuitry configured to correct a first electric field between the target surface of the sample, to which is the voltage is applied, and the irradiator and a second electric field between the target surface of the sample, to which is the voltage is applied, and the detector.
A reflective electron detection apparatus comprising one or more circuitries configured to:
- correct a first electric field between a target surface of a sample to, which a voltage is applied, and an irradiator configured to irradiate the target surface with at least one electron;
- and
- correct a second electric field between the target surface of the sample, to which the voltage is applied, and a detector configured to detect at least a portion of the at least one electron which is reflected from the target surface.
A reflective electron detection apparatus comprising:
- a memory in which at least one instruction is stored;
- and
- at least one processor configured to by executing the at least one instruction:
- control to correct a first electric field between a target surface of a sample, to which a voltage is applied, and an irradiator, such that the target surface is irradiated with at least one electron passing through the corrected first electric field from the irradiator;
- control to correct a second electric field between the target surface of the sample to which the voltage is applied and a detector;
- and
- detect, by using the detector, at least a portion of the at least one electron reflected from the target surface and passing through the corrected second electric field.
Dependencies are inferred from the claim text.