Multiple sensor range single-silicon die structure
AssigneeHoneywell International Inc.
InventorRichard A. Wade
Life of this patent
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Abstract
A pressure sensor component comprising a base wafer comprising a first piezoresistive Wheatstone bridge that is configured to measure a first pressure range associated with a first pressure that is applied onto a surface of the base wafer; and a top wafer that is coupled to the surface, the top wafer comprising (i) a diaphragm that includes a pin element, (ii) a second piezoresistive Wheatstone bridge that is configured to measure a second pressure range that is associated with a force that opposes the first pressure at a base of the pin element, and (iii) a third piezoresistive Wheatstone bridge that is configured to measure a third pressure range that is associated with beam stress at a perimeter of the diaphragm.
Claims20
A pressure sensor component comprising:
- a base wafer comprising a first piezoresistive Wheatstone bridge that is configured to measure a first pressure range associated with a first pressure that is applied onto a surface of the base wafer;
- and
- a top wafer that is coupled to the surface, the top wafer comprising (i) a diaphragm that includes a pin element, (ii) a second piezoresistive Wheatstone bridge that is configured to measure a second pressure range that is associated with a force that opposes the first pressure at a base of the pin element, and (iii) a third piezoresistive Wheatstone bridge that is configured to measure a third pressure range that is associated with beam stress at a perimeter of the diaphragm.
A pressure sensor component comprising:
- a base wafer comprising a first piezoresistive Wheatstone bridge that is configured to measure a first pressure within a first pressure range;
- and
- a top wafer that is coupled to at least a portion of a top surface of the base wafer, the top wafer comprising (i) a second piezoresistive Wheatstone bridge that is configured to measure a second pressure within a second pressure range and (ii) a third piezoresistive Wheatstone bridge that is configured to measure a third pressure within a third pressure range.
A pressure sensor wafer comprising:
- a diaphragm including a pin element;
- a first piezoresistive Wheatstone bridge that is configured to measure a first pressure range that is associated with a force at a base of the pin element;
- and
- a second piezoresistive Wheatstone bridge that is configured to measure a second pressure range that is associated with beam stress at a perimeter of the diaphragm.
Dependencies are inferred from the claim text.