Electrode for capacitive grating displacement sensor

Abstract

An electrode for a capacitive grating displacement sensor. The electrode includes a movable grating plate and a stationary grating plate. The movable grating plate is slidably mounted on the stationary grating plate. The movable grating plate includes a transmitting electrode. The transmitting electrode includes a plurality of mutually inverted trapezoidal structures. The plurality of trapezoidal structures of the transmitting electrode are disposed at equal intervals along a sliding direction of the movable grating plate. The structure is configured to reduce, or even substantially eliminate, the abrupt non-linear errors that arise when the edges of the insulating grooves between conventional transmitting electrodes align with the edges of the electrodes on the stationary grating. This improvement enables an enhancement in the overall measurement accuracy of a measurement device. Additionally, the proposed electrode improves the signal-to-noise ratio of the electrode coupling, resulting in more stable measurement data.

Dependencies are inferred from the claim text.