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US 2026/0103421 A1Published application
Etching device and method of manufacturing window
AssigneeSamsung Display Co., Ltd.
InventorsBEOMSOO KIM, SEUNGJUN LEE, JAEBOK LEE
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Abstract
An etching device includes a mask part including a first mask disposed on a surface of a target substrate, a second mask disposed on the surface and spaced apart from the first mask in a first direction, and a third mask disposed on another surface of the target substrate facing the surface. The etching device includes an adhesive layer including a first adhesive layer disposed between the first mask and the target substrate, a second adhesive layer spaced apart from the first adhesive layer in the first direction and disposed between the second mask and the target substrate, and a third adhesive layer disposed between the third mask and the target substrate.
Claims20
An etching device comprising:
- a mask part comprising:
- a first mask disposed on a surface of a target substrate,
- a second mask disposed on the surface and spaced apart from the first mask in a first direction, and
- a third mask disposed on another surface of the target substrate, wherein the other surface of the target substrate faces the surface;
- and
- an adhesive layer comprising:
- a first adhesive layer disposed between the first mask and the target substrate,
- a second adhesive layer spaced apart from the first adhesive layer in the first direction and disposed between the second mask and the target substrate, and
- a third adhesive layer disposed between the third mask and the target substrate,
- wherein:
- the first mask comprises:
- a first lower portion disposed on the first adhesive layer,
- a first intermediate portion disposed on the first lower portion, and
- a first upper portion disposed on the first intermediate portion,
- the second mask comprises:
- a second lower portion disposed on the second adhesive layer,
- a second intermediate portion disposed on the second lower portion, and
- a second upper portion disposed on the second intermediate portion,
- the first upper portion comprises:
- a first upper base portion aligned with an end of the first lower portion, and
- a first upper protrusion portion extending from the first upper base portion in the first direction, and
- the second upper portion comprises:
- a second upper base portion aligned with an end of the second lower portion, and
- a second upper protrusion portion extending from the second upper base portion in a direction opposite to the first direction.
21 more elements
A method of manufacturing a window, comprising:
- a first operation of preparing:
- a target substrate,
- a first set comprising a preliminary first adhesive layer and a first mask disposed on the preliminary first adhesive layer,
- a second set comprising a second adhesive layer and a second mask disposed on the second adhesive layer,
- a third set comprising a third adhesive layer and a third mask disposed on a lower surface of the third adhesive layer, and
- a chamber accommodating an etching solution;
- a second operation of forming a target substrate set, comprising:
- attaching the first set to a surface of the target substrate using the first adhesive layer,
- attaching the second set to the surface of the target substrate using the second adhesive layer such that the second set is spaced apart from the first set in a first direction, and
- attaching the third set to another surface of the target substrate using the third adhesive layer, wherein the other surface of the target substrate faces the surface;
- and
- a third operation of forming the window, comprising:
- moving the target substrate set in a second direction intersecting the first direction;
- and
- immersing the target substrate set into the etching solution in the chamber,
- wherein:
- the first mask comprises:
- a first lower portion disposed on the first adhesive layer,
- a first intermediate portion disposed on the first lower portion, and
- a first upper portion disposed on the first intermediate portion,
- the second mask comprises:
- a second lower portion disposed on the second adhesive layer,
- a second intermediate portion disposed on the second lower portion, and
- a second upper portion disposed on the second intermediate portion,
- the first upper portion comprises:
- a first upper base portion aligned with an end of the first lower portion, and
- a first upper protrusion portion extending from the first upper base portion in the first direction, and
- the second upper portion comprises:
- a second upper base portion aligned with an end of the second lower portion, and
- a second upper protrusion portion extending from the second upper base portion in a direction opposite to the first direction.
27 more elements
Dependencies are inferred from the claim text.