Scrubbing apparatus

A scrubbing apparatus comprising:

• a scrubbing chamber defining a scrubbing space for scrubbing impurities contained in gas discharged from a process chamber;
• a gas injection pipe having one end connected to the scrubbing chamber and the other end connected to the process chamber, and through which the gas is injected into the scrubbing chamber;
• a gas discharge pipe connected to the scrubbing chamber, through which the gas is discharged to the outside of the scrubbing chamber;
• a first scrubbing plate disposed in the scrubbing chamber;
• a plurality of first scrubbing holes penetrating the first scrubbing plate;
• a solution supply nozzle configured to supply a scrubbing solution onto an upper surface of the first scrubbing plate;
• a first pressure gauge configured to measure a first pressure of the gas passing through the gas injection pipe;
• and
• a first pressure controller provided at a boundary between the gas injection pipe and the scrubbing chamber or within the gas injection pipe and configured to adjust a magnitude of the first pressure,
• wherein bubbles are formed on the upper surface of the first scrubbing plate as the gas ascends through the plurality of first scrubbing holes, and
• wherein the impurities are dissolved in the scrubbing solution at a portion where the bubbles and the scrubbing solution come into contact.