# US 2026/0101799 A1 · Semiconductor structure and method of manufacturing the same

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- Number: US 2026/0101799 A1
- Document ID: US20260101799A1
- Status: Published application
- Kind: A1
- Application number: 18/906,717
- Filed: 2024-10-04
- Published: 2026-04-09
- Earliest claimed: 2024-10-04
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company Ltd.
- Inventors: LI-WEN HO; CHUNG-CHUAN TSENG
- Web page: https://patentgrep.com/patent/US20260101799A1

## CPC

- H10W 72/90: Bond pads, in general
- H10W 72/019: {of bond pads}
- H10W 72/01931: {using blanket deposition}
- H10W 72/01951: {Changing the shapes of bond pads}
- H10W 72/932: {Plan-view shape, i.e. in top view}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A semiconductor structure includes a first conductive element having a first side, a second conductive element having a second side contacting the first side of the first conductive element; and a blocking member, surrounded by the first conductive element and adjacent to the second conductive element. A first width of the first side is substantially greater than a second width of the second side, and at least a portion of the first conductive element is disposed between the second conductive element and the blocking member. A method of manufacturing a semiconductor structure, includes providing a dielectric; patterning the dielectric to form a first opening having a first portion and a second portion connected to the first portion, wherein a blocking member is disposed within the first portion; disposing a first conductive element and a second conductive element into the first portion and the second portion of the first opening respectively.

## Claims

### Claim 1

A semiconductor structure, comprising:
a first conductive element, having a first side;
a second conductive element, having a second side contacting the first side of the first conductive element; and
a blocking member, surrounded by the first conductive element and adjacent to the second conductive element,
wherein a first width of the first side is substantially greater than a second width of the second side, and at least a portion of the first conductive element is disposed between the second conductive element and the blocking member.

### Claim 2 (depends on 1)

The semiconductor structure of claim 1, wherein the first conductive element has a third side opposite to the first side, and a first distance between the first side and the blocking member is substantially less than a second distance between the third side and the blocking member.

### Claim 3 (depends on 2)

The semiconductor structure of claim 2, wherein the first distance is substantially greater than 50 nm.

### Claim 4 (depends on 1)

The semiconductor structure of claim 1, wherein the blocking member includes a concave portion facing the second side of the second conductive element.

### Claim 5 (depends on 1)

The semiconductor structure of claim 1, wherein the blocking member is continuous and integral.

### Claim 6 (depends on 1)

The semiconductor structure of claim 1, wherein the blocking member includes segments separated from each other.

### Claim 7 (depends on 1)

The semiconductor structure of claim 1, wherein the blocking member has a top surface substantially coplanar with a top surface of the first conductive element.

### Claim 8 (depends on 1)

The semiconductor structure of claim 1, wherein the blocking member includes dielectric material.

### Claim 9 (depends on 1)

The semiconductor structure of claim 1, wherein the first width is at least 20 times the second width.

### Claim 10

A semiconductor structure, comprising:
a first blocking member;
a first conductive element surrounding the first blocking member;
a second conductive element contacting the first conductive element; and
a dielectric layer surrounding the first conductive element and the second conductive element,
wherein the first blocking member faces the second conductive element, and a first width of the first blocking member is substantially greater than a second width of the second conductive element.

### Claim 11 (depends on 10)

The semiconductor structure of claim 10, wherein the first blocking member has a top surface substantially coplanar with a top surface of the first conductive element.

### Claim 12 (depends on 10)

The semiconductor structure of claim 10, further comprising:
a third conductive element coupled to the first conductive element; and
a second blocking member surrounded by the third conductive element having a second convex portion;
wherein the first conductive element is disposed between the second conductive element and the third conductive element, the second convex portion faces the second conductive element, and a third width of the second blocking member is greater than the second width of the second conductive element.

### Claim 13 (depends on 12)

The semiconductor structure of claim 12, wherein the second convex portion faces the first blocking member.

### Claim 14

A method of manufacturing a semiconductor structure, comprising:
providing a dielectric layer;
patterning the dielectric layer to form a first opening having a first portion and a second portion connected to the first portion, wherein a blocking member is disposed within the first portion of the first opening;
disposing a first conductive element into the first portion of the first opening, wherein the blocking member is surrounded by the first conductive element; and
disposing a second conductive element into the second portion of the first opening, wherein the second conductive element is electrically connected to the first conductive element.

### Claim 15 (depends on 14)

The method of claim 14, wherein the first opening and the blocking member are formed simultaneously.

### Claim 16 (depends on 14)

The method of claim 14, further comprising:
forming a second opening by removing a third portion of the dielectric layer, and
disposing the blocking member into the second opening before patterning the dielectric layer to form the first opening.

### Claim 17 (depends on 16)

The method of claim 16, wherein the dielectric layer includes a first material and the blocking member includes a second material different from the first material.

### Claim 18 (depends on 14)

The method of claim 14, wherein the first conductive element and the second conductive element are formed simultaneously.

### Claim 19 (depends on 14)

The method of claim 14, wherein the blocking member having a convex portion faces the second portion of the first opening.

### Claim 20 (depends on 14)

The method of claim 14, further comprising:
planarizing the blocking member, the first conductive element and the second conductive element.
