Power Semiconductor Apparatus and Bonding Method Thereof
AssigneeDiodes Incorporated
InventorDuane Wilcoxen
Life of this patent
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Abstract
An apparatus includes a backside supporting layer having a first thickness, an adhesive layer over the backside supporting layer, a metal layer over the adhesive layer, wherein the metal layer functions as a backside connector, a semiconductor substrate layer over the metal layer, wherein the semiconductor substrate active layer has a second thickness, and a plurality of front side connectors, wherein active circuits in the semiconductor substrate layer over are electrically coupled between the plurality of front side connectors and the metal layer.
Claims20
A semiconductor device comprising:
- a backside supporting layer;
- an adhesive layer on and in direct contact with the backside supporting layer;
- a cap layer on and in direct contact with the adhesive layer;
- a metal layer on and in direct contact with the cap layer;
- a semiconductor substrate on and in direct contact with the metal layer;
- a passivation layer over the semiconductor substrate;
- and
- a plurality of connectors over the semiconductor substrate and extending through the passivation layer.
A device comprising:
- a backside supporting layer having a first thickness;
- an adhesive layer over the backside supporting layer;
- a metal layer over the adhesive layer, wherein the metal layer functions as a backside connector;
- a semiconductor substrate layer over the metal layer, wherein the semiconductor substrate layer has a second thickness;
- and
- a plurality of front side connectors, wherein active circuits in the semiconductor substrate layer over are electrically coupled between the plurality of front side connectors and the metal layer.
An apparatus comprising:
- a backside supporting layer having a first thickness;
- an adhesive layer over the backside supporting layer;
- a metal layer over the cap layer, wherein the metal layer has a second thickness;
- and
- a semiconductor substrate layer over the metal layer, wherein the semiconductor substrate layer has a third thickness, wherein:
- the first thickness of the backside supporting layer is at least four times greater than the third thickness of the semiconductor substrate layer;
- and
- the third thickness of the semiconductor substrate layer is greater than the second thickness of the metal layer.
Dependencies are inferred from the claim text.