Semiconductor device, testing system, and method for testing device under test on semiconductor wafer

A testing system, comprising:

• a first semiconductor wafer, comprising a plurality of regions, wherein each of the regions comprises one or more dies;
• a radio frequency (RF) reader, arranged for sending a wireless interrogation signal to the first semiconductor wafer;
• an antenna element, disposed in one of the regions where a device under test (DUT) is located, the antenna element being arranged to couple the wireless interrogation signal into an electrical signal;
• and
• an RF transponder, disposed in the one of the regions and coupled to the antenna element and the DUT, the RF transponder being configured to send a stimulus signal to the DUT in response to the electrical signal, and drive the antenna element to output an modulated RF signal according to a response signal received from the DUT, wherein the response signal is generated from the DUT in response to the stimulus signal, and the modulated RF signal is reflected from the antenna element back to the RF reader.

A method for testing a device under test (DUT) on a semiconductor wafer, comprising:

• coupling a wireless interrogation signal into an electrical signal through an antenna element;
• utilizing a transponder disposed on the semiconductor wafer to receive the electrical signal and accordingly apply a stimulus signal to the DUT, wherein a response signal is outputted from the DUT in response to the stimulus signal;
• and
• modulating a reply signal, reflected from the antenna element in response to the wireless interrogation signal, according to the response signal, wherein the reply signal is indicative of a behavior of the DUT.